TY JOUR TI KW ВЧИ-плазмотрон KW кремний KW Alglib KW ZedGraph KW сплайн KW HF plasma torch KW silicon KW Alglib KW ZedGraph KW spline JO Herald of Technological University AU , .. AU , .. AU , .. AU , .. PY 2025 IS 15 PB Kazan National Research Technological University