TY JOUR TI KW вакуумный насос KW безмасляный вакуум KW средний вакуум KW КЗВН KW Рутс KW vacuum pump KW oil-free vacuum KW average vacuum KW Claw pump KW Roots pump JO Herald of Technological University AU , .. AU , .. AU , .. PY 2025 IS 16 PB Kazan National Research Technological University