%0 Journal Article %T %A , .. %A , .. %A , .. %K вакуумный насос, безмасляный вакуум, насос «сухого» сжатия, откачные характеристики, vacuum pump, oil-free vacuum, average vacuum, pump "dry" compression, the pumping characteristics %J Herald of Technological University %D 2025 %N 16 %P 2 %I Kazan National Research Technological University