TY JOUR TI KW CALS-технологии KW PDM KW особо чистые вещества KW технологический регламент KW CALS-tecnologies KW PDM KW high purity substances KW process regulation JO Herald of Technological University AU , .. AU , .. AU , .. AU , .. AU , .. PY 2025 IS 16 PB Kazan National Research Technological University