TY  JOUR
TI  
KW  конденсация методом КИБ
KW  TiN
KW  АСМ
KW  condensation by PVD
KW  TiN
KW  AFM
JO  Herald of Technological University
AU  , ..
AU  , ..
AU  , ..
PY  2025
IS  16
PB  Kazan National Research Technological University