TY  JOUR
TI  
KW  адсорбционный вакуумный насос
KW  стенд безмасляной откачки
KW  adsorption vacuum pump
KW  oil-free pumping unit
JO  Herald of Technological University
AU  , ..
AU  , ..
PY  2025
IS  17
PB  Kazan National Research Technological University