MODEL' ROSTA KLASTEROV SLOZhNYH SILICIDOV PRI IONNOY IMPLANTACII

N A Balakirev; V A Zhiharev

UDC 537.9; 537.611.44; 519.876.5

MODEL' ROSTA KLASTEROV SLOZHNYH SILICIDOV PRI IONNOY IMPLANTACII MODEL' ROSTA KLASTEROV SLOZhNYH SILICIDOV PRI IONNOY IMPLANTACII

АА Аа

Published in Herald of Technological University · Volume 16, Issue 2 · Pages 21–24 · Rubric: PRIKLADNAYa HIMIYa I HIMIChESKAYa TEHNOLOGIYa

Received: 19.04.2023 Accepted: 01.08.2025 Published: 01.08.2025 Language of publication: RUS

Authors

N A Balakirev

V A Zhiharev

N A Balakirev

KNITU

V A Zhiharev

KNITU

ABSTRACT

The model of the formation of the iron - rich silicide in the thin film under high dose Fe-ion implantation into silicon is purposed. Atoms diffusing within two- dimensional layer attach the growing cluster only if their concentration in vicinity of the cluster is enough for needed phase formation. The described feature of cluster growth results in the formation of dense structures with the fractal dimension of order of 1.85-1.9. Magnetic interaction of diffusing atoms with growing ferromagnetic cluster leads to the sufficient elongation of the cluster. This elongation can be a source of uniaxial magnetic anisotropy in plane of the implanted layer.

KEYWORDS

Агрегация, ограниченная диффузией, фрактальная размерность, дендриты, диполь-дипольное взаимодействие, ионная имплантация, Diffusion limited aggregation, fractal dimension, dendrites, dipole-dipole interaction, ion implantation

1. Smirnov B.M. Fizika fraktal'nyh klasterov.-M:Nauka. (1991)

2. T.A.Witten,L.M.Sander, Phys. Rev. Lett. 47 (1981) 1400.

3. J.M.D.Coey, G. Hinds, Europhys. Lett., 47 (2) (1999) 267-272.

4. T.R. Mhiochain, J.M.D.Coey JMMM 226-230 (2001) 1281-1283.

5. T.R Ni Mhiochain, J.M.D. Coey Phys. Rev. E 69 (2004) 061404.

6. L.M. Martyushev, L.G.Gorbich Pis'ma v ZhTF t.29 (2003) 36-42.

7. D.G.Grier, D. Mueth Phys.Rev. E v.48 (1993) 3841-3848.

8. B.X. Liu, K.Tao Nucl.Inst.and Meth.In Phys. Res. B80/81 (1993) 332-335.

9. F. Chen, K. M. Wang, B. R. Shi , H. Hu J. Phys.: Condens. Matter 13 (2001) 5893-5899.

10. D. Nakagauchi, T. Yoshitake, K. Nagayama Vacuum 74 (2004) 653-657

11. A.L. Stepanov, V.A. Zhiharev, I.B. Haybullin FTT (2001) 733-739.

12. N.A.Balakirev et al. Comp. Material Science 50 (2011) 2925- 2929.

13. N.A. Balakirev, V.A. Zhiharev, G. G. Gumarov Vestnik KNITU, t.15 (2012) 7-10.

14. N.A. Balakirev, V.A. Zhiharev Vestnik KNITU №20 (2011) 16-20.

JATS XML

Head of the Publishing house

Raziya Romanova

romanova_rg@mail.ru

Deputy Editor-in-Chief

Aleksandr Dresvyannikov

a.dresvyannikov@mail.ru

Executive Secretary

Svetlana Goryunova

svetlanagoryunova@yandex.ru

Editor-in-Chief

Yurij Kazakov

office@kstu.ru

Deputy Editor-in-Chief

Oleg Mickailov

olegmkhlv@gmail.com

727

downloads

MODEL' ROSTA KLASTEROV SLOZHNYH SILICIDOV PRI IONNOY IMPLANTACII MODEL' ROSTA KLASTEROV SLOZhNYH SILICIDOV PRI IONNOY IMPLANTACII

Confirmation