Analysis of interrelation parameters of vacuum sputtering process complex deposition parameters and process quality indicators revealed that have most effect on the reflection coefficient and it is possible to monitor all indicators of quality of the deposition process. The optimal way of building automatic control system, which leads to stabilization of quality of process, is the stabilization of the reflection coefficient in the interaction zone.
металлизация ткани, вакуум, плазма, tissue metallizing, vacuum, plasma
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