A newly developed two-stage unit on the basis of claw and Roots pumps was studied. The chart of the experimental unit for pumping characteristics measurement is presented. The obtained relationships of the pumping speed, ultimate pressure and gas temperature are discussed.
вакуумный насос, безмасляный вакуум, средний вакуум, КЗВН, Рутс, vacuum pump, oil-free vacuum, average vacuum, Claw pump, Roots pump
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