Analysis of the relationship parameters vacuum sputter process complex deposition parameters and process quality indicators revealed that the greatest effect on the reflection coefficient and it is possible to monitor all indicators of quality of the deposition process. The optimal way of building a system of automatic control vacuum sputter of technological complex, leading to stabilization of quality process is the stabilization of the reflection coefficient in the interaction zone.
металлизация ткани, вакуум, плазма, tissue metallizing, vacuum, plasma
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