ISSLEDOVANIE IONNO-PLAZMENNYH KONDENSATOV NA NACHAL'NYH STADIYAH ROSTA
Authors:
1.
KNITU
2.
KNITU
3.
KNITU
Type:
Article
eLocation:
Status:
Published
Received:
19.04.2023
Accepted:
01.08.2025
Published:
01.08.2025
Subject area:
UDC 621.9
Language:
Russian
Keywords:
очистка поверхности, ВЧЕ плазменная обработка, surface cleaning, high-frequency plasma processing
Abstract (English):
We investigated the forming a coating of nitrides of refractory metal. Coating obtained by condensation of the plasma phase in ion bombardment. Growth rate coating in the initial stages of the growth (15 seconds) on steel substrate with the potential-150V, 2 times greater than the dielectric and reaches up to 26 nm/s.
We investigated the forming a coating of nitrides of refractory metal. Coating obtained by condensation of the plasma phase in ion bombardment. Growth rate coating in the initial stages of the growth (15 seconds) on steel substrate with the potential-150V, 2 times greater than the dielectric and reaches up to 26 nm/s.
Keywords:
очистка поверхности, ВЧЕ плазменная обработка, surface cleaning, high-frequency plasma processing
очистка поверхности, ВЧЕ плазменная обработка, surface cleaning, high-frequency plasma processing
1. Abdullin I.Sh., Mironov M.M., Vasil'ev I.I. Formirovanie nanostrukturirovannogo kompozicionnogo pokrytiya v plazme dugovogo razryada// Vestnik Kazan. tehnol. un-ta.- 2012, № 20. - S. 29-30.
2. Anciferov V.N., Kameneva A.L. Izvestiya Vuzov. Poroshkovaya metallurgiya i funkcional'nye pokrytiya. M.: ZAO «Kalvis». №1, 2007. S. 53.
3. Abdullin I.Sh. Modifikaciya nanosloev v vysokochastotnoy plazme ponizhennogo davleniya / I.Sh. Abdullin, V.S. Zheltuhin, I.R. Sagbiev, M.F.Shaehov. - Kazan': Izd-vo Kazan. tehnol. un-ta, 2007. - 356 s.
4. Abdullin I.Sh., Vasil'ev I.I. Finishnaya podgotovka poverhnosti neteplostoykih instrumental'nyh staley pered naneseniem zaschitnyh pokrytiy Vestnik Kazan. tehnol. un-ta.- - 2013, № 5. - S. 180-181.
