ISSLEDOVANIE FORMIROVANIYA NITRIDNOGO POKRYTIYA IZ PLAZMY DUGOVOGO RAZRYADA ATOMNO-SILOVOY MIKROSKOPIEY
Authors:
1.
KNITU
2.
KNITU
3.
KNITU
Type:
Article
eLocation:
Status:
Published
Received:
19.04.2023
Accepted:
01.08.2025
Published:
01.08.2025
Subject area:
UDC 621.9
Language:
Russian
Keywords:
конденсация методом КИБ, TiN, АСМ, condensation by PVD, TiN, AFM
Abstract (English):
The shown the experimental results of research into the initial stages of coating TiN growth. Growth of the coating takes place in accordance with the mechanism of the Volmer-Weber. Coating obtained by condensation of the plasma phase in ion bombardment. In the initial stages of coating growth (up to 55 seconds), the rate was 0.08 nm / s and the size of the islands reached the up to 40-50nm and height to 3-4 nm.
The shown the experimental results of research into the initial stages of coating TiN growth. Growth of the coating takes place in accordance with the mechanism of the Volmer-Weber. Coating obtained by condensation of the plasma phase in ion bombardment. In the initial stages of coating growth (up to 55 seconds), the rate was 0.08 nm / s and the size of the islands reached the up to 40-50nm and height to 3-4 nm.
Keywords:
конденсация методом КИБ, TiN, АСМ, condensation by PVD, TiN, AFM
конденсация методом КИБ, TiN, АСМ, condensation by PVD, TiN, AFM
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