VOZDUSHNOE OHLAZHDENIE INDUKCIONNOGO VCH-PLAZMATRONA PONIZHENNOGO DAVLENIYA
Authors:
1.
KNITU
2.
KNITU
3.
KNITU
Type:
Article
Pages:
from 248
to 250
Status:
Published
Received:
20.04.2023
Accepted:
01.08.2025
Published:
01.08.2025
Subject area:
UDC 621.79.01
Language:
Russian
Keywords:
плазматрон, тепловой расчет, индукционный ВЧ разряд, plasma generator, thermal analysis, inductively coupled RF discharge
Abstract (English):
Results of replacement of the design of water-cooledinductively coupled plasma generatorto air cooling are presented. A comparative analysis of the advantages and disadvantages of the two schemes is carried out. Efficiency of low pressure plasma generator with air cooling is provided by experimental approbation. Test thermal analysis of plasma generator design in CAE program ANSYS is carried out.
Results of replacement of the design of water-cooledinductively coupled plasma generatorto air cooling are presented. A comparative analysis of the advantages and disadvantages of the two schemes is carried out. Efficiency of low pressure plasma generator with air cooling is provided by experimental approbation. Test thermal analysis of plasma generator design in CAE program ANSYS is carried out.
Keywords:
плазматрон, тепловой расчет, индукционный ВЧ разряд, plasma generator, thermal analysis, inductively coupled RF discharge
плазматрон, тепловой расчет, индукционный ВЧ разряд, plasma generator, thermal analysis, inductively coupled RF discharge
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