The article describes the description of mass-spectrometry facility based on a quadrupole mass-spectrometer for the study of the mass-spectrum of the tail gas from scroll vacuum pumps, as well as the experimental technique.
масс-спектрометр, безмасляный вакуум, остаточный газ, вакуумный насос, экспериментальные исследования, состав газа, вакуумная система, спиральный насос, mass-spectrometer, oil-free vacuum, tail gas, a vacuum pump, the experimental studies, the composition of the gas, the vacuum system, scroll pump
1. Duval, P. Will tomorrows high-vacuum pumps be universal or highly specialized? / P. Duval // Journal of Vacuum Science and Technology. - 1987. - V. 5, A5. - P. 2546-2551.
2. Sovremennoe sostoyanie rynka bezmaslyanyh forvakuumnyh sredstv otkachki / I. V. Anufrieva, Yu. K. Vasil'ev, V. N. Kemenov, S. B. Nesterov, T. S. Strogova // Vakuumnaya tehnika i tehnologiya. - 2003. - T.13, № 2. - C. 93-99.
3. Burmistrov, A.V. Nekotorye aspekty vybora bezmaslyanyh nasosov srednego vakuuma / A.V. Burmistrov, S.I. Salikeev, A.A. Raykov // Vestnik Kazanskogo tehnologicheskogo universiteta. - 2013, T.16. - № 10. - C.220-223.
4. Burmistrov A.V. Stend issledovatel'skih ispytaniy bezmaslyanyh spiral'nyh vakuumnyh nasosov / A.V. Burmistrov, A.A. Raykov, S.I. Salikeev, A.V. Gavrilov, V.P. Matveev // Vestnik Kazanskogo tehnologicheskogo universiteta. - 2013 , T.16. - № 14 C. 174-177.
5. Microvision 2 Residual Gas Analyzer (RGA). - Rezhim dostupa: http://www.mksinst.com/product/product.aspx?ProductID=184/, svobodnyy
6. Dry Scroll Vacuum Pumps [Elektronnyy resurs] / AnestIwata. - USA.: Anest Iwata,2013.- Rezhim dostupa: http://anestiwata.com/product-category/vacuum-pumps/, svobodnyy.
7. Busch: Info.Fossa- Spiral vacuum pump [Elektronnyyresurs] / BuschGmbH.-Germany.:BuschGmbH,2013. - Rezhim dostupa: http://www.busch.de/en/ products/product-portfolio/fossa/info/, svobodnyy.
