SINTEZ NANOKRISTALICHESKIH ALMAZNYH MEMBRAN METODOM HIMICHESKOGO OSAZHDENIYA V SVCH PLAZME
Authors:
1.
Institut obschey fiziki im. A.M. Prohorova RAN, OOO «SVD.Spark» g.Troick
2.
Institut obschey fiziki im. A.M. Prohorova RAN; OOO «SVD.Spark» g.Troick
3.
Institut obschey fiziki im. A.M. Prohorova RAN
4.
Institut obschey fiziki im. A.M. Prohorova RAN
5.
Institut obschey fiziki im. A.M. Prohorova RAN
6.
Institut obschey fiziki im. A.M. Prohorova RAN
Type:
Article
eLocation:
Status:
Published
Received:
19.04.2023
Accepted:
01.08.2025
Published:
01.08.2025
Subject area:
UDC 620.3
Language:
Russian
Keywords:
СВЧ плазма, нанокристаллический алмаз, мембраны, nanocrystalline diamond, membranes
Abstract (English):
Nanocrystalline diamond layers with thickness of ca. 300 nm were grown on silicon substrates by microwave plasma chemical vapor deposition. Using this layer as a base, diamond membranes with diameter 100-200 μm were formed by local etching of silicon. The diamond nature of the membranes was confirmed by Raman spectroscopy. Photoluminescence (PL) spectra reveled an intense peak at a wavelength of 738 nm, corresponding to emission from silicon-vacancy (Si-V) center in diamond. The produced membranes can be of interest for fabrication of microresonators for photonics selectively enhancing PL intensity at certain wavelengths.
Nanocrystalline diamond layers with thickness of ca. 300 nm were grown on silicon substrates by microwave plasma chemical vapor deposition. Using this layer as a base, diamond membranes with diameter 100-200 μm were formed by local etching of silicon. The diamond nature of the membranes was confirmed by Raman spectroscopy. Photoluminescence (PL) spectra reveled an intense peak at a wavelength of 738 nm, corresponding to emission from silicon-vacancy (Si-V) center in diamond. The produced membranes can be of interest for fabrication of microresonators for photonics selectively enhancing PL intensity at certain wavelengths.
Keywords:
СВЧ плазма, нанокристаллический алмаз, мембраны, nanocrystalline diamond, membranes
СВЧ плазма, нанокристаллический алмаз, мембраны, nanocrystalline diamond, membranes
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